How Thermal Mass Changes the Behavior of a Mica Heating Plate

https://engineered-heat-solutions.stonefielddigest.com/posts/wafer-heater-basics-understanding-thermal-control-in-semiconductor-processing

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry